Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9515633 | Transformer coupled capacitive tuning circuit with fast impedance switching for plasma etch chambers | Alex Paterson | 2016-12-06 |
| 9490106 | Internal Faraday shield having distributed chevron patterns and correlated positioning relative to external inner and outer TCP coil | John Drewery, Alex Paterson | 2016-11-08 |
| 9384948 | Hammerhead TCP coil support for high RF power conductor etch systems | Alex Paterson | 2016-07-05 |
| 9336996 | Plasma processing systems including side coils and methods related to the plasma processing systems | Alex Paterson | 2016-05-10 |
| 9305750 | Adjusting current ratios in inductively coupled plasma processing systems | Seyed Jafar Jafarian-Tehrani | 2016-04-05 |
| 9293353 | Faraday shield having plasma density decoupling structure between TCP coil zones | Alex Paterson, Ricky Marsh, Ying Wu, John Drewery | 2016-03-22 |