Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9490106 | Internal Faraday shield having distributed chevron patterns and correlated positioning relative to external inner and outer TCP coil | Maolin Long, Alex Paterson | 2016-11-08 |
| 9336901 | Track and hold feedback control of pulsed RF | — | 2016-05-10 |
| 9293353 | Faraday shield having plasma density decoupling structure between TCP coil zones | Maolin Long, Alex Paterson, Ricky Marsh, Ying Wu | 2016-03-22 |
| 9257296 | Etch process with pre-etch transient conditioning | Wonchul Lee, Qian Fu | 2016-02-09 |