Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530658 | Continuous plasma etch process | Wonchul Lee | 2016-12-27 |
| 9466502 | Line width roughness improvement with noble gas plasma | Shih-Yuan Cheng, Shenjian Liu, Youn Gi Hong | 2016-10-11 |
| 9418869 | Method to etch a tungsten containing layer | Hua Xiang | 2016-08-16 |
| 9275872 | Method for forming stair-step structures | Hyun-Yong YU | 2016-03-01 |
| 9263284 | Line width roughness improvement with noble gas plasma | Shih-Yuan Cheng, Shenjian Liu, Youn Gi Hong | 2016-02-16 |
| 9257296 | Etch process with pre-etch transient conditioning | Wonchul Lee, John Drewery | 2016-02-09 |