Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9466502 | Line width roughness improvement with noble gas plasma | Shih-Yuan Cheng, Shenjian Liu, Qian Fu | 2016-10-11 |
| 9263284 | Line width roughness improvement with noble gas plasma | Shih-Yuan Cheng, Shenjian Liu, Qian Fu | 2016-02-16 |