Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9385003 | Residue free systems and methods for isotropically etching silicon in tight spaces | Ming-Shu KUO, Qinghua Zhong, Ganesh Upadhyaya, Gowri Kamarthy | 2016-07-05 |
| 9230819 | Internal plasma grid applications for semiconductor fabrication in context of ion-ion plasma processing | Alex Paterson, Do-Young Kim, Gowri Kamarthy, Jen-Kan Yu, Monica Titus +5 more | 2016-01-05 |