Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9466466 | Determination of semiconductor chamber operating parameters for the optimization of critical dimension uniformity | Qinghua Zhong, Ryan Martin | 2016-10-11 |
| 9385003 | Residue free systems and methods for isotropically etching silicon in tight spaces | Ming-Shu KUO, Qinghua Zhong, Helene Del Puppo, Gowri Kamarthy | 2016-07-05 |
| 9252238 | Semiconductor structures with coplanar recessed gate layers and fabrication methods | Kristina Trevino, Yuan-Hung Liu, Gabriel Padron Wells, Xing Zhang, Hoong Shing Wong +4 more | 2016-02-02 |