Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9385003 | Residue free systems and methods for isotropically etching silicon in tight spaces | Qinghua Zhong, Helene Del Puppo, Ganesh Upadhyaya, Gowri Kamarthy | 2016-07-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9385003 | Residue free systems and methods for isotropically etching silicon in tight spaces | Qinghua Zhong, Helene Del Puppo, Ganesh Upadhyaya, Gowri Kamarthy | 2016-07-05 |