Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9484214 | Systems and methods for improving wafer etch non-uniformity when using transformer-coupled plasma | Tom A. Kamp, Alex Paterson | 2016-11-01 |
| 9412670 | System, method and apparatus for RF power compensation in plasma etch chamber | Robert Griffith O'Neill, Eric Tonnis, Seetharaman Ramachandran, Shang-I Chou | 2016-08-09 |
| 9322795 | Electrode for use in measuring dielectric properties of parts | Jaehyun Kim, Keith Comendant, Qing Liu, Feiyang Wu | 2016-04-26 |