Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9412670 | System, method and apparatus for RF power compensation in plasma etch chamber | Robert Griffith O'Neill, Arthur H. Sato, Seetharaman Ramachandran, Shang-I Chou | 2016-08-09 |
ET
Eric Tonnis
Overall (2016): #406,574 of 481,213Top 85%
1
Patents 2016