Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9435692 | Calculating power input to an array of thermal control elements to achieve a two-dimensional temperature output | Ole Waldmann, Eric A. Pape, Francisco Martinez | 2016-09-06 |
| 9412670 | System, method and apparatus for RF power compensation in plasma etch chamber | Arthur H. Sato, Eric Tonnis, Seetharaman Ramachandran, Shang-I Chou | 2016-08-09 |
| 9337002 | Corrosion resistant aluminum coating on plasma chamber components | John Daugherty, Hong Shih, Lin Xu, Anthony Amadio, Peter Holland +5 more | 2016-05-10 |