Issued Patents 2016
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9505036 | Portable sonic particle removal tool with a chemically controlled working fluid | Armen Avoyan, Cliff LaCroix, John Daugherty | 2016-11-29 |
| 9393666 | Adapter plate for polishing and cleaning electrodes | Catherine Zhou, Duane Outka, Cliff LaCroix | 2016-07-19 |
| 9396912 | Methods for mixed acid cleaning of showerhead electrodes | Armen Avoyan, Cliff La Croix, John Daugherty | 2016-07-19 |
| 9387521 | Method of wet cleaning aluminum chamber parts | Fan-Cheung Sze, Brian McMillin, John Daugherty, Yan Fang, Duane Outka +2 more | 2016-07-12 |
| 9337002 | Corrosion resistant aluminum coating on plasma chamber components | John Daugherty, Lin Xu, Anthony Amadio, Robert Griffith O'Neill, Peter Holland +5 more | 2016-05-10 |
| 9293305 | Mixed acid cleaning assemblies | Armen Avoyan, Cliff La Croix, John Daugherty | 2016-03-22 |
| 9245719 | Dual phase cleaning chambers and assemblies comprising the same | Armen Avoyan, Cliff La Croix | 2016-01-26 |