Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9387521 | Method of wet cleaning aluminum chamber parts | Hong Shih, Fan-Cheung Sze, John Daugherty, Yan Fang, Duane Outka +2 more | 2016-07-12 |
| 9267605 | Pressure control valve assembly of plasma processing chamber and rapid alternating process | Mirzafer Abatchev, Camelia Rusu | 2016-02-23 |