Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9514955 | Patterning of a hard mask material | Joydeep Guha | 2016-12-06 |
| 9330926 | Fabrication of a silicon structure and deep silicon etch with profile control | Robert Chebi, Frank Y. Lin, Jaroslaw W. Winniczek, Wan-Lin Chen, Erin McDonnell +3 more | 2016-05-03 |
| 9267605 | Pressure control valve assembly of plasma processing chamber and rapid alternating process | Mirzafer Abatchev, Brian McMillin | 2016-02-23 |