Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9330926 | Fabrication of a silicon structure and deep silicon etch with profile control | Frank Y. Lin, Jaroslaw W. Winniczek, Wan-Lin Chen, Erin McDonnell, Lily Zheng +3 more | 2016-05-03 |
| 9318341 | Methods for etching a substrate | Alan Cheshire, Gabriel Roupillard, Alfredo Granados | 2016-04-19 |