Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9330926 | Fabrication of a silicon structure and deep silicon etch with profile control | Robert Chebi, Frank Y. Lin, Wan-Lin Chen, Erin McDonnell, Lily Zheng +3 more | 2016-05-03 |