Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9514955 | Patterning of a hard mask material | Camelia Rusu | 2016-12-06 |
| 9431269 | Dual chamber plasma etcher with ion accelerator | — | 2016-08-30 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9514955 | Patterning of a hard mask material | Camelia Rusu | 2016-12-06 |
| 9431269 | Dual chamber plasma etcher with ion accelerator | — | 2016-08-30 |