Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478497 | Single spacer process for multiplying pitch by a factor greater than two and related intermediate IC structures | David H. Wells | 2016-10-25 |
| 9305782 | Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same | Baosuo Zhou, Ardavan Niroomand, Paul A. Morgan, Shuang Meng, Joseph Neil Greely +1 more | 2016-04-05 |
| 9267605 | Pressure control valve assembly of plasma processing chamber and rapid alternating process | Camelia Rusu, Brian McMillin | 2016-02-23 |