Issued Patents 2016
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9505036 | Portable sonic particle removal tool with a chemically controlled working fluid | Armen Avoyan, Cliff LaCroix, Hong Shih | 2016-11-29 |
| 9502275 | Service tunnel for use on capital equipment in semiconductor manufacturing and research fabs | David Trussell, Michael C. Kellogg, Christopher Pena, Richard H. Gould, Klay Kunkel | 2016-11-22 |
| 9396912 | Methods for mixed acid cleaning of showerhead electrodes | Armen Avoyan, Cliff La Croix, Hong Shih | 2016-07-19 |
| 9387521 | Method of wet cleaning aluminum chamber parts | Hong Shih, Fan-Cheung Sze, Brian McMillin, Yan Fang, Duane Outka +2 more | 2016-07-12 |
| 9337002 | Corrosion resistant aluminum coating on plasma chamber components | Hong Shih, Lin Xu, Anthony Amadio, Robert Griffith O'Neill, Peter Holland +5 more | 2016-05-10 |
| 9314854 | Ductile mode drilling methods for brittle components of plasma processing apparatuses | Lihua Huang, Duane D. Scott, Joseph P. Doench, Jamie Burns, Emily P. Stenta +1 more | 2016-04-19 |
| 9293305 | Mixed acid cleaning assemblies | Armen Avoyan, Cliff La Croix, Hong Shih | 2016-03-22 |