| 9505036 |
Portable sonic particle removal tool with a chemically controlled working fluid |
Armen Avoyan, Cliff LaCroix, Hong Shih |
2016-11-29 |
| 9502275 |
Service tunnel for use on capital equipment in semiconductor manufacturing and research fabs |
David Trussell, Michael C. Kellogg, Christopher Pena, Richard H. Gould, Klay Kunkel |
2016-11-22 |
| 9396912 |
Methods for mixed acid cleaning of showerhead electrodes |
Armen Avoyan, Cliff La Croix, Hong Shih |
2016-07-19 |
| 9387521 |
Method of wet cleaning aluminum chamber parts |
Hong Shih, Fan-Cheung Sze, Brian McMillin, Yan Fang, Duane Outka +2 more |
2016-07-12 |
| 9337002 |
Corrosion resistant aluminum coating on plasma chamber components |
Hong Shih, Lin Xu, Anthony Amadio, Robert Griffith O'Neill, Peter Holland +5 more |
2016-05-10 |
| 9314854 |
Ductile mode drilling methods for brittle components of plasma processing apparatuses |
Lihua Huang, Duane D. Scott, Joseph P. Doench, Jamie Burns, Emily P. Stenta +1 more |
2016-04-19 |
| 9293305 |
Mixed acid cleaning assemblies |
Armen Avoyan, Cliff La Croix, Hong Shih |
2016-03-22 |
