Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9323052 | Lithography pupil shaping optical system and method for generating off-axis illumination mode | Fang Zhang, Jing Zhu, Huijie Huang, Qiang Song, Baoxi Yang +4 more | 2016-04-26 |
| 9314854 | Ductile mode drilling methods for brittle components of plasma processing apparatuses | Duane D. Scott, Joseph P. Doench, Jamie Burns, Emily P. Stenta, Gregory R. Bettencourt +1 more | 2016-04-19 |