Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9400433 | Lithography illumination system | Aijun Zeng, Linglin Zhu, Ruifang FANG | 2016-07-26 |
| 9323052 | Lithography pupil shaping optical system and method for generating off-axis illumination mode | Fang Zhang, Jing Zhu, Qiang Song, Baoxi Yang, Ming-Hung Chen +4 more | 2016-04-26 |
| 9297744 | Device and method for measuring phase retardation distribution and fast axis azimuth angle distribution in real time | Aijun Zeng, Longhai Liu, Linglin Zhu | 2016-03-29 |