Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9400433 | Lithography illumination system | Aijun Zeng, Ruifang FANG, Huijie Huang | 2016-07-26 |
| 9297744 | Device and method for measuring phase retardation distribution and fast axis azimuth angle distribution in real time | Aijun Zeng, Longhai Liu, Huijie Huang | 2016-03-29 |