Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9393666 | Adapter plate for polishing and cleaning electrodes | Catherine Zhou, Cliff LaCroix, Hong Shih | 2016-07-19 |
| 9387521 | Method of wet cleaning aluminum chamber parts | Hong Shih, Fan-Cheung Sze, Brian McMillin, John Daugherty, Yan Fang +2 more | 2016-07-12 |
| 9337002 | Corrosion resistant aluminum coating on plasma chamber components | John Daugherty, Hong Shih, Lin Xu, Anthony Amadio, Robert Griffith O'Neill +5 more | 2016-05-10 |