Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9502275 | Service tunnel for use on capital equipment in semiconductor manufacturing and research fabs | John Daugherty, Michael C. Kellogg, Christopher Pena, Richard H. Gould, Klay Kunkel | 2016-11-22 |