Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9392643 | Heating plate with planar heater zones for semiconductor processing | Harmeet Singh, Keith Gaff, Neil Benjamin | 2016-07-12 |
| 9322795 | Electrode for use in measuring dielectric properties of parts | Jaehyun Kim, Arthur H. Sato, Qing Liu, Feiyang Wu | 2016-04-26 |
| 9318349 | Plasma chamber top piece assembly | Leonard J. Sharpless | 2016-04-19 |