Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530679 | Method and apparatus for chuck thermal calibration | Keith Gaff | 2016-12-27 |
| 9392643 | Heating plate with planar heater zones for semiconductor processing | Harmeet Singh, Keith Gaff, Keith Comendant | 2016-07-12 |
| 9287096 | Methods and apparatus for a hybrid capacitively-coupled and an inductively-coupled plasma processing system | Alexei Marakhtanov, Eric A. Hudson, Rajinder Dhindsa | 2016-03-15 |