Issued Patents 2016
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9401264 | Control of impedance of RF delivery path | Rajinder Dhindsa, Ken Lucchesi, Luc Albarede | 2016-07-26 |
| 9396908 | Systems and methods for controlling a plasma edge region | Rajinder Dhindsa | 2016-07-19 |
| 9337000 | Control of impedance of RF return path | Rajinder Dhindsa, Ken Lucchesi, Luc Albarede | 2016-05-10 |
| 9337004 | Grounded confinement ring having large surface area | Rajhinder Dhindsa | 2016-05-10 |
| 9287096 | Methods and apparatus for a hybrid capacitively-coupled and an inductively-coupled plasma processing system | Eric A. Hudson, Rajinder Dhindsa, Neil Benjamin | 2016-03-15 |
| 9263240 | Dual zone temperature control of upper electrodes | Rajinder Dhindsa, Ryan Bise, Lumin Li, Sang Ki Nam, Jim Rogers +5 more | 2016-02-16 |
| 9251999 | Capacitively-coupled plasma processing system having a plasma processing chamber for processing a substrate | Rajinder Dhindsa, Eric A. Hudson, Andreas Fischer | 2016-02-02 |
| 9245720 | Methods and apparatus for detecting azimuthal non-uniformity in a plasma processing system | Rajinder Dhindsa | 2016-01-26 |