Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9396910 | Heat transfer plate for a showerhead electrode assembly of a capacitively coupled plasma processing apparatus | Sang Ki Nam, Rajinder Dhindsa | 2016-07-19 |
| 9263240 | Dual zone temperature control of upper electrodes | Alexei Marakhtanov, Rajinder Dhindsa, Lumin Li, Sang Ki Nam, Jim Rogers +5 more | 2016-02-16 |
| 9245718 | Showerhead electrode assembly in a capacitively coupled plasma processing apparatus | Sang Ki Nam, Rajinder Dhindsa | 2016-01-26 |