Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9515156 | Air gap spacer integration for improved fin device performance | Paul R. Besser, Bart J. van Schravendijk, Yoshie Kimura, Harald Orkorn-Schmidt, Dengliang Yang | 2016-12-06 |
| 9396961 | Integrated etch/clean for dielectric etch applications | Reza Arghavani, Shashank Deshmukh, Eric A. Hudson, Tom A. Kamp, Samantha Tan | 2016-07-19 |
| 9263240 | Dual zone temperature control of upper electrodes | Alexei Marakhtanov, Rajinder Dhindsa, Ryan Bise, Lumin Li, Sang Ki Nam +5 more | 2016-02-16 |