Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478411 | Method to tune TiOx stoichiometry using atomic layer deposited Ti film to minimize contact resistance for TiOx/Ti based MIS contact scheme for CMOS | Ishtak Karim, Sanjay Gopinath, Reza Arghavani, Michal Danek | 2016-10-25 |
| 9478438 | Method and apparatus to deposit pure titanium thin film at low temperature using titanium tetraiodide precursor | Ishtak Karim, Sanjay Gopinath, Michal Danek | 2016-10-25 |