Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9502262 | Nanocrystalline diamond carbon film for 3D NAND hardmask application | Yongmei Chen, Christopher S. Ngai, Jun Xue, Chentsau Ying, Ludovic Godet | 2016-11-22 |
| 9484202 | Apparatus and methods for spacer deposition and selective removal in an advanced patterning process | Jie Zhou, Chentsau Ying, Shambhu N. Roy, Srinivas D. Nemani, Ellie Yieh | 2016-11-01 |
| 9382625 | Remote plasma source based cyclic CVD process for nanocrystalline diamond deposition | Jun Xue, Yongmei Chen, Ludovic Godet, Chentsau Ying, Shambhu N. Roy | 2016-07-05 |