| 9520267 |
Bias voltage frequency controlled angular ion distribution in plasma processing |
Ludovic Godet, Prashanth Kothnur, Umesh M. Kelkar, Matthew D. Scotney-Castle |
2016-12-13 |
| 9502258 |
Anisotropic gap etch |
Ching-Mei Hsu, Zihui Li, Ludovic Godet, Anchuan Wang, Nitin K. Ingle |
2016-11-22 |
| 9502262 |
Nanocrystalline diamond carbon film for 3D NAND hardmask application |
Yongmei Chen, Christopher S. Ngai, Jingjing Liu, Chentsau Ying, Ludovic Godet |
2016-11-22 |
| 9412613 |
Development of high etch selective hardmask material by ion implantation into amorphous carbon films |
Pramit Manna, Abhijit Basu Mallick, Ludovic Godet, Yongmei Chen, Mukund Srinivasan +2 more |
2016-08-09 |
| 9382625 |
Remote plasma source based cyclic CVD process for nanocrystalline diamond deposition |
Jingjing Liu, Yongmei Chen, Ludovic Godet, Chentsau Ying, Shambhu N. Roy |
2016-07-05 |
| 9313321 |
Screen unlocking method and device for mobile terminal |
Liang Zeng, Lei Chen |
2016-04-12 |
