Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9502258 | Anisotropic gap etch | Jun Xue, Ching-Mei Hsu, Ludovic Godet, Anchuan Wang, Nitin K. Ingle | 2016-11-22 |
| 9449850 | Processing systems and methods for halide scavenging | Anchuan Wang, Xinglong Chen, Hiroshi Hamana, Zhijun Chen, Ching-Mei Hsu +5 more | 2016-09-20 |
| 9412608 | Dry-etch for selective tungsten removal | Xikun Wang, Ching-Mei Hsu, Nitin K. Ingle, Anchuan Wang | 2016-08-09 |
| 9406523 | Highly selective doped oxide removal method | Zhijun Chen, Nitin K. Ingle, Anchuan Wang, Shankar Venkataraman | 2016-08-02 |