Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9502258 | Anisotropic gap etch | Jun Xue, Zihui Li, Ludovic Godet, Anchuan Wang, Nitin K. Ingle | 2016-11-22 |
| 9449845 | Selective titanium nitride etching | Jie Liu, Jingchun Zhang, Anchuan Wang, Nitin K. Ingle, Seung Ho Park +1 more | 2016-09-20 |
| 9449850 | Processing systems and methods for halide scavenging | Anchuan Wang, Xinglong Chen, Zihui Li, Hiroshi Hamana, Zhijun Chen +5 more | 2016-09-20 |
| 9437451 | Radical-component oxide etch | Zhijun Chen, Jingchun Zhang, Seung Ho Park, Anchuan Wang, Nitin K. Ingle | 2016-09-06 |
| 9412608 | Dry-etch for selective tungsten removal | Xikun Wang, Nitin K. Ingle, Zihui Li, Anchuan Wang | 2016-08-09 |
| 9378969 | Low temperature gas-phase carbon removal | Nitin K. Ingle, Hiroshi Hamana, Anchuan Wang | 2016-06-28 |