Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9476764 | Wavefront adjustment in extreme ultra-violet (EUV) lithography | Chia-Ching Huang, Tzu-Hsiang Chen, Chia-Chen Chen | 2016-10-25 |
| 9405204 | Method of overlay in extreme ultra-violet (EUV) lithography | Chia-Ching Huang, Chia-Chen Chen | 2016-08-02 |
| 9377693 | Collector in an extreme ultraviolet lithography system with optimal air curtain protection | Chia-Ching Huang, Tsung-Yu Chen, Shinn-Sheng Yu, Chia-Chen Chen | 2016-06-28 |
| 9373552 | Method of calibrating or exposing a lithography tool | Yu-Chao Lin, Kuo-Yu Wu, Chia-Jen Chen, Chao-Cheng Chen | 2016-06-21 |
| 9348133 | Image projection method and MEMS image projection apparatus | Chun-Lai Hsiao | 2016-05-24 |
| 9268129 | Driving calibration apparatus of electrostatic MEMS scanning mirror and driving calibration method thereof | Yu-Nan Tsai | 2016-02-23 |