Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9476764 | Wavefront adjustment in extreme ultra-violet (EUV) lithography | Chia-Hao Hsu, Tzu-Hsiang Chen, Chia-Chen Chen | 2016-10-25 |
| 9405204 | Method of overlay in extreme ultra-violet (EUV) lithography | Chia-Hao Hsu, Chia-Chen Chen | 2016-08-02 |
| 9377693 | Collector in an extreme ultraviolet lithography system with optimal air curtain protection | Tsung-Yu Chen, Chia-Hao Hsu, Shinn-Sheng Yu, Chia-Chen Chen | 2016-06-28 |