Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9476764 | Wavefront adjustment in extreme ultra-violet (EUV) lithography | Chia-Ching Huang, Chia-Hao Hsu, Chia-Chen Chen | 2016-10-25 |
| 9429858 | Rotary EUV collector | Shang-Chieh Chien, Shu-Hao Chang, Jui-Ching Wu, Tsung-Yu Chen, Ming-Chin Chien +2 more | 2016-08-30 |