Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9429858 | Rotary EUV collector | Shang-Chieh Chien, Shu-Hao Chang, Tsung-Yu Chen, Tzu-Hsiang Chen, Ming-Chin Chien +2 more | 2016-08-30 |
| 9412632 | Reticle pod | Tsung-Yen Lee, Jeng-Horng Cheng | 2016-08-09 |
| 9229326 | Method for integrated circuit patterning | Yen-Cheng Lu, Shu-Hao Chang, Shinn-Sheng Yu, Jeng-Horng Chen, Anthony Yen | 2016-01-05 |