Issued Patents 2016
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9529272 | Extreme ultraviolet lithography process and mask | Shinn-Sheng Yu, Jeng-Horng Chen, Anthony Yen | 2016-12-27 |
| 9488905 | Extreme ultraviolet lithography process and mask with reduced shadow effect and enhanced intensity | Shinn-Sheng Yu, Jeng-Horng Chen, Anthony Yen | 2016-11-08 |
| 9448491 | Extreme ultraviolet lithography process and mask | Shinn-Sheng Yu, Jeng-Horng Chen, Anthony Yen | 2016-09-20 |
| 9442365 | Mask for extreme ultraviolet lithography and method of fabricating same | Shinn-Sheng Yu, Jeng-Horng Chen, Anthony Yen | 2016-09-13 |
| 9442387 | Extreme ultraviolet lithography process | Shinn-Sheng Yu, Anthony Yen | 2016-09-13 |
| 9442384 | Extreme ultraviolet lithography process and mask | Shinn-Sheng Yu, Jeng-Horng Chen, Anthony Yen | 2016-09-13 |
| 9417534 | Lithography method and structure for resolution enhancement with a two-state mask | Shinn-Sheng Yu, Anthony Yen | 2016-08-16 |
| 9412647 | Via definition scheme | Chih-Tsung Shih, Shinn-Sheng Yu, Jeng-Horng Chen, Anthony Yen | 2016-08-09 |
| 9405195 | Method to define multiple layer patterns with a single exposure by charged particle beam lithography | Chih-Tsung Shih, Jeng-Horng Chen, Shinn-Sheng Yu, Anthony Yen | 2016-08-02 |
| 9377696 | Extreme ultraviolet lithography process and mask | Shinn-Sheng Yu, Jeng-Horng Chen, Anthony Yen | 2016-06-28 |
| 9304390 | Extreme ultraviolet lithography process and mask | Shinn-Sheng Yu, Jeng-Horng Chen, Anthony Yen | 2016-04-05 |
| 9285671 | Mask for use in lithography | Shinn-Sheng Yu, Anthony Yen | 2016-03-15 |
| 9280046 | Method of fabricating mask | Anthony Yen, Chih-Tsung Shih, Ming-Jiun Yao, Shinn-Sheng Yu, Jeng-Horng Chen +1 more | 2016-03-08 |
| 9261774 | Extreme ultraviolet lithography process and mask with reduced shadow effect and enhanced intensity | Shinn-Sheng Yu, Jeng-Horng Chen, Anthony Yen | 2016-02-16 |
| 9252048 | Metal and via definition scheme | Chih-Tsung Shih, Shinn-Sheng Yu, Jeng-Horng Chen, Anthony Yen | 2016-02-02 |
| 9244366 | Extreme ultraviolet lithography process and mask | Shinn-Sheng Yu, Jeng-Horng Chen, Anthony Yen | 2016-01-26 |
| 9229326 | Method for integrated circuit patterning | Shu-Hao Chang, Shinn-Sheng Yu, Jui-Ching Wu, Jeng-Horng Chen, Anthony Yen | 2016-01-05 |