Issued Patents 2016
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9529249 | Extreme ultraviolet lithography process and mask | Shinn-Sheng Yu, Jeng-Horng Chen, Anthony Yen | 2016-12-27 |
| 9482615 | Single-molecule detection system and methods | Chung-Fan Chiou, Ying-Chih Pu, Chao-Chi Pan, Ming-Chia Li, Chein-Shiu Kuo +2 more | 2016-11-01 |
| 9442368 | Method of making an extreme ultraviolet pellicle | Tien-Hsi Lee, Chia-Jen Chen, Shang-Chieh Chien, Shinn-Sheng Yu, Jeng-Horng Chen +1 more | 2016-09-13 |
| 9418862 | Method for integrated circuit patterning | Tsung-Min Huang, Chieh-Han Wu, Chung-Ju Lee, Jeng-Horng Chen, Shinn-Sheng Yu | 2016-08-16 |
| 9412647 | Via definition scheme | Yen-Cheng Lu, Shinn-Sheng Yu, Jeng-Horng Chen, Anthony Yen | 2016-08-09 |
| 9405195 | Method to define multiple layer patterns with a single exposure by charged particle beam lithography | Yen-Cheng Lu, Jeng-Horng Chen, Shinn-Sheng Yu, Anthony Yen | 2016-08-02 |
| 9389506 | Photoresist having improved extreme-ultraviolet lithography imaging performance | Shu-Hao Chang, Tsiao-Chen Wu | 2016-07-12 |
| 9354507 | Extreme ultraviolet lithography process and mask | Shinn-Sheng Yu, Jeng-Horng Chen, Anthony Yen | 2016-05-31 |
| 9316900 | Extreme ultraviolet lithography process and mask | Shinn-Sheng Yu, Jeng-Horng Chen, Anthony Yen | 2016-04-19 |
| 9310675 | Extreme ultraviolet light (EUV) photomasks, and fabrication methods thereof | Tao Huang, Chia-Jen Chen, Hsin-Chang Lee, Anthony Yen | 2016-04-12 |
| 9285673 | Assist feature for a photolithographic process | Tao Huang, Chia-Jen Chen, Hsin-Chang Lee, Shinn-Sheng Yu, Jeng-Horng Chen +1 more | 2016-03-15 |
| 9280046 | Method of fabricating mask | Anthony Yen, Ming-Jiun Yao, Yen-Cheng Lu, Shinn-Sheng Yu, Jeng-Horng Chen +1 more | 2016-03-08 |
| 9257282 | Method of semiconductor integrated circuit fabrication | Tsung-Min Huang, Chung-Ju Lee, Shinn-Sheng Yu, Jeng-Horng Chen, Anthony Yen | 2016-02-09 |
| 9256123 | Method of making an extreme ultraviolet pellicle | Tien-Hsi Lee, Chia-Jen Chen, Shang-Chieh Chien, Shinn-Sheng Yu, Jeng-Horng Chen +1 more | 2016-02-09 |
| 9252048 | Metal and via definition scheme | Yen-Cheng Lu, Shinn-Sheng Yu, Jeng-Horng Chen, Anthony Yen | 2016-02-02 |