Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9442368 | Method of making an extreme ultraviolet pellicle | Chih-Tsung Shih, Chia-Jen Chen, Shang-Chieh Chien, Shinn-Sheng Yu, Jeng-Horng Chen +1 more | 2016-09-13 |
| 9256123 | Method of making an extreme ultraviolet pellicle | Chih-Tsung Shih, Chia-Jen Chen, Shang-Chieh Chien, Shinn-Sheng Yu, Jeng-Horng Chen +1 more | 2016-02-09 |