Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9442368 | Method of making an extreme ultraviolet pellicle | Chih-Tsung Shih, Tien-Hsi Lee, Chia-Jen Chen, Shinn-Sheng Yu, Jeng-Horng Chen +1 more | 2016-09-13 |
| 9429858 | Rotary EUV collector | Shu-Hao Chang, Jui-Ching Wu, Tsung-Yu Chen, Tzu-Hsiang Chen, Ming-Chin Chien +2 more | 2016-08-30 |
| 9256123 | Method of making an extreme ultraviolet pellicle | Chih-Tsung Shih, Tien-Hsi Lee, Chia-Jen Chen, Shinn-Sheng Yu, Jeng-Horng Chen +1 more | 2016-02-09 |