Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9310675 | Extreme ultraviolet light (EUV) photomasks, and fabrication methods thereof | Chih-Tsung Shih, Chia-Jen Chen, Hsin-Chang Lee, Anthony Yen | 2016-04-12 |
| 9285673 | Assist feature for a photolithographic process | Chia-Jen Chen, Hsin-Chang Lee, Chih-Tsung Shih, Shinn-Sheng Yu, Jeng-Horng Chen +1 more | 2016-03-15 |