Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478434 | Chlorine-based hardmask removal | Xikun Wang, Mandar B. Pandit, Zhenjiang Cui, Mikhail Korolik, Anchuan Wang +1 more | 2016-10-25 |
| 9449845 | Selective titanium nitride etching | Jingchun Zhang, Anchuan Wang, Nitin K. Ingle, Seung Ho Park, Zhijun Chen +1 more | 2016-09-20 |
| 9449846 | Vertical gate separation | Vinod R. Purayath, Xikun Wang, Anchuan Wang, Nitin K. Ingle | 2016-09-20 |
| 9309598 | Oxide and metal removal | Xikun Wang, Anchuan Wang, Nitin K. Ingle, Jeffrey W. Anthis, Benjamin Schmiege | 2016-04-12 |
| 9299575 | Gas-phase tungsten etch | Seung Ho Park, Xikun Wang, Anchuan Wang, Sang Jin Kim | 2016-03-29 |