Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478434 | Chlorine-based hardmask removal | Xikun Wang, Zhenjiang Cui, Mikhail Korolik, Anchuan Wang, Nitin K. Ingle +1 more | 2016-10-25 |
| 9390910 | Gas flow profile modulated control of overlay in plasma CVD films | Prashant Kumar Kulshreshtha, Sudha Rathi, Praket P. Jha, Saptarshi Basu, Kwangduk Douglas Lee +5 more | 2016-07-12 |
| 9373522 | Titanium nitride removal | Xikun Wang, Anchuan Wang, Nitin K. Ingle | 2016-06-21 |
| 9355862 | Fluorine-based hardmask removal | Xikun Wang, Zhenjiang Cui, Mikhail Korolik, Anchuan Wang, Nitin K. Ingle | 2016-05-31 |
| 9355820 | Methods for removing carbon containing films | Wei Liu, Naomi Yoshida | 2016-05-31 |
| 9343272 | Self-aligned process | Anchuan Wang, Nitin K. Ingle | 2016-05-17 |
| 9337314 | Technique for selectively processing three dimensional device | Nilay A. Pradhan, Benjamin Colombeau, Naushad K. Variam, Christopher Dennis Bencher, Adam Brand | 2016-05-10 |