Issued Patents 2016
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9484274 | Methods for reducing semiconductor substrate strain variation | Ehud Tzuri, Ellie Yieh | 2016-11-01 |
| 9478421 | Optically tuned hardmask for multi-patterning applications | Daniel Lee Diehl, Huixiong Dai, Yong Cao, Tingjun Xu, Weimin Zeng +1 more | 2016-10-25 |
| 9411237 | Resist hardening and development processes for semiconductor device manufacturing | Peng Xie, Huixiong Dai, Timothy Michaelson, Subhash Deshmukh | 2016-08-09 |
| 9395631 | Multi-beam pattern generators employing yaw correction when writing upon large substrates, and associated methods | — | 2016-07-19 |
| 9383649 | Digital grey tone lithography for 3D pattern formation | — | 2016-07-05 |
| 9377692 | Electric/magnetic field guided acid diffusion | Peng Xie, Ludovic Godet, Tristan Y. Ma, Joseph C. Olson | 2016-06-28 |
| 9337051 | Method for critical dimension reduction using conformal carbon films | Bencherki Mebarki, Bok Hoen Kim, Deenesh Padhi, Li Yan Miao, Pramit Manna +4 more | 2016-05-10 |
| 9337314 | Technique for selectively processing three dimensional device | Nilay A. Pradhan, Benjamin Colombeau, Naushad K. Variam, Mandar B. Pandit, Adam Brand | 2016-05-10 |