Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9411237 | Resist hardening and development processes for semiconductor device manufacturing | Peng Xie, Christopher Dennis Bencher, Huixiong Dai, Timothy Michaelson | 2016-08-09 |
| 9378941 | Interface treatment of semiconductor surfaces with high density low energy plasma | Aneesh Nainani, Bhushan Zope, Leonid Dorf, Shahid Rauf, Adam Brand +1 more | 2016-06-28 |