Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9528183 | Cobalt removal for chamber clean or pre-clean process | Kai Wu, Bo Zheng, Sang Ho Yu, Avgerinos V. Gelatos, Jeffrey W. Anthis +1 more | 2016-12-27 |
| 9378941 | Interface treatment of semiconductor surfaces with high density low energy plasma | Aneesh Nainani, Leonid Dorf, Shahid Rauf, Adam Brand, Mathew Abraham +1 more | 2016-06-28 |
| 9330939 | Method of enabling seamless cobalt gap-fill | Avgerinos V. Gelatos, Bo Zheng, Yu Lei, Xinyu Fu, Srinivas Gandikota +2 more | 2016-05-03 |