| 9530627 |
Method for cleaning titanium alloy deposition |
Xinliang Lu, Kyoung-Ho BU, Jing Zhou, Seshadri Ganguli, David Thompson |
2016-12-27 |
| 9514933 |
Film deposition using spatial atomic layer deposition or pulsed chemical vapor deposition |
Yu Lei, Seshadri Ganguli, Bo Zheng, Rajkumar Jakkaraju, Martin Jeff Salinas +1 more |
2016-12-06 |
| 9330939 |
Method of enabling seamless cobalt gap-fill |
Bhushan Zope, Avgerinos V. Gelatos, Bo Zheng, Yu Lei, Xinyu Fu +2 more |
2016-05-03 |
| 9230815 |
Methods for depositing fluorine/carbon-free conformal tungsten |
Xinyu Fu, Avgerinos V. Gelatos, Atif Noori, Mei Chang, David Thompson +1 more |
2016-01-05 |
| 9230835 |
Integrated platform for fabricating n-type metal oxide semiconductor (NMOS) devices |
Avgerinos V. Gelatos, Seshadri Ganguli, Xinyu Fu, Bo Zheng, Yu Lei |
2016-01-05 |
