Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9441298 | Devices including metal-silicon contacts using indium arsenide films and apparatus and methods | Khaled Ahmed, Prabu Gopalraja, Atif Noori | 2016-09-13 |
| 9353440 | Dual-direction chemical delivery system for ALD/CVD chambers | Zhenbin Ge, Chien-Teh Kao, Joel M. Huston | 2016-05-31 |
| 9305805 | Methods for atomic layer etching | Joseph Yudovsky | 2016-04-05 |
| 9269584 | N-metal film deposition with initiation layer | Seshadri Ganguli, Xinliang Lu, Atif Noori, Maitreyee Mahajani, Shih Chung Chen | 2016-02-23 |
| 9252024 | Deposition chambers with UV treatment and methods of use | Hyman Lam, Nicholas R. Denny, Joseph AuBuchon | 2016-02-02 |
| 9230815 | Methods for depositing fluorine/carbon-free conformal tungsten | Xinyu Fu, Srinivas Gandikota, Avgerinos V. Gelatos, Atif Noori, David Thompson +1 more | 2016-01-05 |