Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9472443 | Selectively groundable cover ring for substrate process chambers | Muhammad M. Rasheed, Kirankumar Neelasandra SAVANDAIAH, William Johanson, Goichi Yoshidome | 2016-10-18 |
| 9353440 | Dual-direction chemical delivery system for ALD/CVD chambers | Chien-Teh Kao, Joel M. Huston, Mei Chang | 2016-05-31 |